Fig. 1. Schematic diagram of three-dimensional structure of conic flexure hinge

Fig. 2. Schematic diagram of mechanical structure of Fast Tool Servo（FTS）

Fig. 3. Schematic diagram of typical flexible mechanism^［19］

Fig. 4. Schematic diagram of flexible tool holder

Fig. 5. Evolution curve of optimal fitness

Fig. 6. Simulation result of flexible tool

Fig. 7. Distribution of deformation stress of flexible tool holder

Fig. 8. Vibration locus of FTS

Fig. 9. FTS response curve to excitation signal

Fig. 10. Amplitude-frequency characteristic curve of FTS

Fig. 11. Motion resolution of FTS

Fig. 12. Tracking performance of FTS

Fig. 13. Trajectory tracking error of FTS

Fig. 14. Schematic diagram of experimental devices for micro-structure surface cutting

Fig. 15. Micro profile of fabricated micro structures