Spectroscopy and Spectral Analysis, Volume. 36, Issue 10, 3265(2016)
Thickness Calculation of Silicon Dioxide Nano-Film Based on GIXRR Reflectivity Curve
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MA Yi-bo, WANG Mei-ling, WANG Hai, YUAN Pei, FAN Yan, XING Hua-chao, GAO Si-tian. Thickness Calculation of Silicon Dioxide Nano-Film Based on GIXRR Reflectivity Curve[J]. Spectroscopy and Spectral Analysis, 2016, 36(10): 3265
Received: Jul. 24, 2015
Accepted: --
Published Online: Dec. 30, 2016
The Author Email: Yi-bo MA (1750593719@qq.com)