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Spectroscopy and Spectral Analysis, Volume. 36, Issue 10, 3265(2016)

Thickness Calculation of Silicon Dioxide Nano-Film Based on GIXRR Reflectivity Curve

MA Yi-bo1...2,*, WANG Mei-ling2, WANG Hai2, YUAN Pei1, FAN Yan1,2, XING Hua-chao1,2 and GAO Si-tian2 |Show fewer author(s)
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  • 2[in Chinese]
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    MA Yi-bo, WANG Mei-ling, WANG Hai, YUAN Pei, FAN Yan, XING Hua-chao, GAO Si-tian. Thickness Calculation of Silicon Dioxide Nano-Film Based on GIXRR Reflectivity Curve[J]. Spectroscopy and Spectral Analysis, 2016, 36(10): 3265

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    Paper Information

    Received: Jul. 24, 2015

    Accepted: --

    Published Online: Dec. 30, 2016

    The Author Email: Yi-bo MA (1750593719@qq.com)

    DOI:10.3964/j.issn.1000-0593(2016)10-3265-04

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology