Spectroscopy and Spectral Analysis, Volume. 31, Issue 12, 3815(2011)
The Influence of Laser Plasma Effects on the Characteristics of Silicon Surface Damage
[1] [1] Arora V K, Dawar A L. Applied Optics, 1996, 35: 7061.
[2] [2] Amera M S, El-Ashrya M A, Dosserb L R, et al. Applied Surface Science, 2005, 242: 162.
[3] [3] Bennis A, Lomonosov A M, Shen Z H, et al. Applied Physics Letters, 2006, 88: 101915.
[4] [4] Venkatakrishnan K, Sudani N. Journal of Micromechanics and Microengineering, 2008, 18: 075032.
[5] [5] Paehler D, Schneider D, Herben M. Microelectronic Engineering, 2007, 84(2): 340.
[6] [6] Emmony D, Howson R, Willis L. Applied Physics Letters, 1973, 23: 598.
[7] [7] Tomita T, Fukumori Y, Kinoshita K, et al. Applied Physics Letters, 2008, 92: 013104.
[8] [8] Makin V, Pestov Y, Makin R, et al. Journey of Optical Technology, 2009, 76: 555.
[9] [9] Bonse J, Rosenfeld A, Krüger J. Applied Physics, 2009, 106: 104910.
[10] [10] Huang M, Zhao F, Cheng Y, et al. ACS Nano, 2009, 3: 4062.
[12] [12] Demchuk A V, Labunov V A. Applied Surface Science, 1995, 86: 353.
[13] [13] Lemons R A, Bocsh M A. Applied Physics Letters, 1981, 39(4): 343.
[14] [14] von Allmen M. Laser-Beam Interactions with Materials. Berlin: Springer-Verlag, 1987.
[15] [15] Przemyslaw W Wachulak, Andrzej Bartnik, et al. Optics Letters, 2010, 35(14): 2337.
[16] [16] Shimada Y, Nishimura H, Nakai M, et al. Applied Physics Letters, 2005, 86: 051501.
[17] [17] Keldysh L V. Sov. Phys. JETP, 1965, 20: 1018.
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FAN Wei-xing, HAN Jing-hua, LI Hai-bo, YANG Li-ming, FENG Guo-ying, GAO Xiang, LIU Yan-yan, BAO Ling-dong, HUANG Yong-zhong. The Influence of Laser Plasma Effects on the Characteristics of Silicon Surface Damage[J]. Spectroscopy and Spectral Analysis, 2011, 31(12): 3815
Received: Aug. 15, 2011
Accepted: --
Published Online: Jan. 5, 2012
The Author Email: Wei-xing FAN (fwx_hjh@163.com)