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Spectroscopy and Spectral Analysis, Volume. 31, Issue 12, 3815(2011)

The Influence of Laser Plasma Effects on the Characteristics of Silicon Surface Damage

FAN Wei-xing1...2,*, HAN Jing-hua1, LI Hai-bo3, YANG Li-ming3, FENG Guo-ying1, GAO Xiang1, LIU Yan-yan1, BAO Ling-dong1 and HUANG Yong-zhong1 |Show fewer author(s)
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  • 3[in Chinese]
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    FAN Wei-xing, HAN Jing-hua, LI Hai-bo, YANG Li-ming, FENG Guo-ying, GAO Xiang, LIU Yan-yan, BAO Ling-dong, HUANG Yong-zhong. The Influence of Laser Plasma Effects on the Characteristics of Silicon Surface Damage[J]. Spectroscopy and Spectral Analysis, 2011, 31(12): 3815

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    Paper Information

    Received: Aug. 15, 2011

    Accepted: --

    Published Online: Jan. 5, 2012

    The Author Email: Wei-xing FAN (fwx_hjh@163.com)

    DOI:1000-0593(2011)12-3185-05

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology