Optics and Precision Engineering, Volume. 18, Issue 10, 2178(2010)
Dynamic testing of MEMS micro-structure and its measurement system at low temperatures
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Dynamic testing of MEMS micro-structure and its measurement system at low temperatures[J]. Optics and Precision Engineering, 2010, 18(10): 2178
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Received: Dec. 8, 2009
Accepted: --
Published Online: Feb. 15, 2011
The Author Email: (dutsds@gmail.com)
CSTR:32186.14.