Acta Optica Sinica, Volume. 31, Issue 3, 322002(2011)
Freeform-Surface Design of Off-Axis Illumination in Projection Lithography
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Xing Shasha, Wu Rengmao, Li Haifeng, Zheng Zhenrong, Liu Xu. Freeform-Surface Design of Off-Axis Illumination in Projection Lithography[J]. Acta Optica Sinica, 2011, 31(3): 322002
Paper Information
Category: Optical Design and Fabrication
Received: Aug. 11, 2010
Accepted: --
Published Online: Mar. 1, 2011
The Author Email: Shasha Xing (xss222@163.com)
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