Acta Photonica Sinica, Volume. 35, Issue 7, 981(2006)
Study of Integrator Rod in Step-and-scan Lithography
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Guo Liping, Huang Huijie, Wang Xiangzhao. Study of Integrator Rod in Step-and-scan Lithography[J]. Acta Photonica Sinica, 2006, 35(7): 981
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Received: Mar. 10, 2005
Accepted: --
Published Online: Jun. 3, 2010
The Author Email: Liping Guo (guoliping@siom.ac.cn)
CSTR:32186.14.