Acta Photonica Sinica, Volume. 35, Issue 7, 981(2006)

Study of Integrator Rod in Step-and-scan Lithography

Guo Liping1...2,*, Huang Huijie1 and Wang Xiangzhao1 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(12)

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    Guo Liping, Huang Huijie, Wang Xiangzhao. Study of Integrator Rod in Step-and-scan Lithography[J]. Acta Photonica Sinica, 2006, 35(7): 981

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    Paper Information

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    Received: Mar. 10, 2005

    Accepted: --

    Published Online: Jun. 3, 2010

    The Author Email: Liping Guo (guoliping@siom.ac.cn)

    DOI:

    CSTR:32186.14.

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