Study of Integrator Rod in Step-and-scan Lithography

Acta Photonica Sinica, Volume. 35, Issue 7, 981(2006)

Guo Liping1...2,*, Huang Huijie1 and Wang Xiangzhao1 |Show fewer author(s)

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Guo Liping, Huang Huijie, Wang Xiangzhao. Study of Integrator Rod in Step-and-scan Lithography[J]. Acta Photonica Sinica, 2006, 35(7): 981

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Received: Mar. 10, 2005

Accepted: --

Published Online: Jun. 3, 2010

The Author Email: Liping Guo (guoliping@siom.ac.cn)

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