Optical Instruments, Volume. 45, Issue 3, 74(2023)
Design of microscope objective for laser scanning of MEMS galvanometer
[6] [6] TAUSCHER J, DAVIS W O, BROWN D, et al. Evolution of MEMS scanning mirrs f laser projection in compact consumer electronics[C]Proceedings Volume 7594, MOEMS Miniaturized Systems IX. San Francisco, Califnia, United States: SPIE, 2010: 75940A.
[12] PIYAWATTANAMETHA W, RA H, LOEWKE K E, et al.
[13] [13] WU T Y, GMITRO A F, ROUSE A R. An achromatized miniature objective f microendoscopy[C]International Optical Design Conference 2014. OSA Technical Digest Series. Kohala Coast, Hawaii, United States: Optical Society of America, 2014: IW4A. 2.
Get Citation
Copy Citation Text
Xingyu WANG, Zhaoqing YANG, Meng XUE, Hanming GUO. Design of microscope objective for laser scanning of MEMS galvanometer[J]. Optical Instruments, 2023, 45(3): 74
Category: DESIGN AND RESEARCH
Received: Dec. 1, 2022
Accepted: --
Published Online: Jul. 25, 2023
The Author Email: GUO Hanming (hmguo@usst.edu.cn)