Optical Instruments, Volume. 45, Issue 3, 74(2023)
Design of microscope objective for laser scanning of MEMS galvanometer
Figures & Tables(10)
Table 1. Related parameters of MEMS galvanometer
View tableView in ArticleTable 1. Related parameters of MEMS galvanometer
参数名称 指标 波段范围 扫描角度（快轴） 扫描频率（快轴） 反射窗尺寸 整体尺寸 400～1800 nm ±18° 29.3 kHz Ф1.23 mm 28.60 mm×20.42 mm
Table 2. Objective design criteria
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参数 指标 入瞳直径 像方视场角 工作波段 数值孔径 分辨率 物方半视场 工作距 最大外径 总长 1.1 mm ±18° 800～860 nm 0.4 1.26 μm ＞0.4 mm ＞0.8 mm ＜5 mm ＜25 mm
Table 3. Data of lens
View tableView in ArticleTable 3. Data of lens
透镜组 初始结构曲率 半径/mm 优化曲率 半径/mm 优化结构 材料 透镜组1 −62.26 H-ZF3 −6.84 H-BAK7A 3.01 透镜组2 −8.46 −70.40 H-ZF62 7.55 −20.12 H-ZLAF90 36.60 −5.75 透镜组3 91.85 −2.45 H-ZF3 12.64 3.46 H-BAK7A −18.58 −3.31 透镜组4 15.83 10.03 D-FK61A −15.71 −2.36 H-ZF11 93.06 14.76 透镜组5 15.40 15.48 H-LAK10 60.69 −4.09 透镜组6 13.76 13.96 H-QF8 −15.72 4.03 H-ZLAF69 61.41 60.11 透镜组7 5.36 2.11 H-ZLAF68C −8.21 7.35 ZF4 707.26 1.82
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Xingyu WANG, Zhaoqing YANG, Meng XUE, Hanming GUO. Design of microscope objective for laser scanning of MEMS galvanometer[J]. Optical Instruments, 2023, 45(3): 74
Paper Information
Category: DESIGN AND RESEARCH
Received: Dec. 1, 2022
Accepted: --
Published Online: Jul. 25, 2023
The Author Email: GUO Hanming (hmguo@usst.edu.cn)
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