Optoelectronics Letters, Volume. 9, Issue 5, 371(2013)
Preparation of high-quality AlN films by two-step method of radio frequency magnetron sputtering
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ZHU Yu-qing, CHEN Xi-ming, LI Fu-long, LI Xiao-wei, YAN GBao-he. Preparation of high-quality AlN films by two-step method of radio frequency magnetron sputtering[J]. Optoelectronics Letters, 2013, 9(5): 371
Received: Jul. 2, 2013
Accepted: --
Published Online: Oct. 12, 2017
The Author Email: Xi-ming CHEN (xmchen2006@126.com)