Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Optoelectronics Letters, Volume. 9, Issue 5, 371(2013)

Preparation of high-quality AlN films by two-step method of radio frequency magnetron sputtering

Yu-qing ZHU, Xi-ming CHEN*, Fu-long LI, Xiao-wei LI, and GBao-he YAN
Author Affiliations
  • School of Electronics Information Engineering, Tianjin University of Technology, Tianjin 300384, China
    • show less
    Abstract
    Figures&Tables (0)
    Equations (0)
    References (14)
    Tools
    Paper Information
    Topics
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    ZHU Yu-qing, CHEN Xi-ming, LI Fu-long, LI Xiao-wei, YAN GBao-he. Preparation of high-quality AlN films by two-step method of radio frequency magnetron sputtering[J]. Optoelectronics Letters, 2013, 9(5): 371

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Received: Jul. 2, 2013

    Accepted: --

    Published Online: Oct. 12, 2017

    The Author Email: Xi-ming CHEN (xmchen2006@126.com)

    DOI:10.1007/s11801-013-3115-2

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology