Fig. 1. Simulation results by ray tracing method

Fig. 2. Process of making suspended Au grating

Fig. 3. Electroplating and sample of Au grating

Fig. 4. Images of photoresist with and without fractures

Fig. 5. Contrast images of stiffener effect

Fig. 6. Simulation results and experimental results of EBL etching of different dose etching， the blue figure is the simulation result， and the gray figure is the SEM image of EBL experimental result at the same dose

Fig. 7. Testing system and results of Au grating