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Chinese Optics Letters, Volume. 13, Issue 8, 082201(2015)

Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator

Jun Cheng* and Nan Yan
Author Affiliations
  • School of Electromechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
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    Article index updated:Feb. 23, 2023

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    The article is cited by 8 article(s) from Web of Science.
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    Jun Cheng, Nan Yan. Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator[J]. Chinese Optics Letters, 2015, 13(8): 082201

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Mar. 21, 2015

    Accepted: Jun. 8, 2015

    Published Online: Sep. 14, 2018

    The Author Email: Jun Cheng (2120100260@bit.edu.cn)

    DOI:10.3788/COL201513.082201

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology