Laser & Optoelectronics Progress, Volume. 58, Issue 1, 100004(2021)
Particulate Control Technology Based on Pulsed Laser Deposition
[3] Eason R W. May-Smith T C, Sloyan K A, et al. Multi-beam pulsed laser deposition for advanced thin-film optical waveguides[J]. Journal of Physics D: Applied Physics, 47, 034007(2014).
[8] Luther-Davies B, Kolev V Z, Lederer M J et al. Table-top 50-W laser system for ultra-fast laser ablation[J]. Applied Physics A, 79, 1051-1055(2004).
[9] Peng M D, Lu W E, Xia Y et al. Study on preparation and properties of superconducting niobium films by pulsed laser deposition[J]. Materials Reports, 32, 105-109(2018).
[13] Greer J A, Tabat M D. Large-area pulsed laser deposition: techniques and applications[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 13, 1175-1181(1995).
[15] Fähler S, Störmer M, Krebs H U. Origin[J]. avoidance of droplets during laser ablation of metals. Applied Surface Science, 109/110, 433-436(1997).
[16] Weaver I. Lewis C L S. Polar distribution of ablated atomic material during the pulsed laser deposition of Cu in vacuum: dependence on focused laser spot size and power density[J]. Journal of Applied Physics, 79, 7216-7222(1996).
[17] [17] Schenck PK, Vaudin MD, Bonnell DW, et al., 1998, 127/128/129: 655- 661.
[18] [18] BraunS, DietschR, HaidlM, et al. ( PLD) [J]. MicroelectronicEngineering, 2001, 57/58: 9- 15.
[19] Sakai S, Takahashi M, Motohashi K et al. Large-area pulsed-laser deposition of dielectric and ferroelectric thin films[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 25, 903-907(2007).
[21] [21] Wagner FX, ScaggsM, KochA, et al., 1998, 127/128/129: 477- 480.
[22] Rong F X. Liquid target pulsed laser deposition[J]. Applied Physics Letters, 67, 1022-1024(1995).
[23] Szörényi T, Kántor Z, Tóth Z et al[J]. molten metals. Applied Surface Science, 138/139, 275-279(1999).
[26] Marcu A. Grigoriu1 C, Jiang W H,et al. Pulsed laser deposition of YBCO thin films in a shadow mask configuration[J]. Thin Solid Films, 360, 166-172(2000).
[27] Popescu A C, Duta L, Dorcioman G et al. Radical modification of the wetting behavior of textiles coated with ZnO thin films and nanoparticles when changing the ambient pressure in the pulsed laser deposition process[J]. Journal of Applied Physics, 110, 064321(2011).
[28] Dai S J, Yu J, Mo Z Q et al. Uniform and smooth molybdenum film produced through picosecond pulsed laser deposition[J]. Journal of Vacuum Science & Technology A, 37, 061506(2019).
[30] Cherief N, Givord D, Liénard A et al. Laser ablation deposition and magnetic characterization of metallic thin films based on rare earth and transition metals[J]. Journal of Magnetism and Magnetic Materials, 121, 94-101(1993).
[33] Mukherjee D, Hyde R, Mukherjee P et al. Advantages of dual-laser ablation in the growth of multicomponent thin films[J]. AIP Conference Proceedings, 1464, 325-335(2012).
[34] Prentice J J. Grant-Jacob J A, Kurilchik S V, et al. Particulate reduction in PLD-grown crystalline films via bi-directional target irradiation[J]. Applied Physics A, 125, 1-8(2019).
[37] Amoruso S, Ausanio G, Barone A C et al. Nanoparticles size modifications during femtosecond laser ablation of nickel in vacuum[J]. Applied Surface Science, 254, 1012-1016(2007).
[43] Teghil R. Santagata A, de Bonis A, et al. Applications of ultra-short pulsed laser ablation: thin films deposition and fs/ns dual-pulse laser-induced breakdown spectroscopy[J]. Physica Scripta, 78, 058113(2008).
[45] Krstulović N, Salamon K, Modic M et al. Dynamics of double-pulse laser produced titanium plasma inferred from thin film morphology and optical emission spectroscopy[J]. Spectrochimica Acta Part B: Atomic Spectroscopy, 107, 67-74(2015).
[46] Krstulović N, Čutić N, Milošević S. Cavity ringdown spectroscopy of collinear dual-pulse laser plasmas in vacuum[J]. Spectrochimica Acta Part B: Atomic Spectroscopy, 64, 271-277(2009).
[47] Murakami M, Liu B, Hu Z D et al. Burst-mode femtosecond pulsed laser deposition for control of thin film morphology and material ablation[J]. Applied Physics Express, 2, 042501(2009).
[50] Broekmaat J J, Dekkers J M, Janssens J A, filter: EP20100170223[P] et al. -07-21(2010).
[51] [51] Gorbunov AA, PompeW, SewingA, et al., 1996, 96/97/98: 649- 655.
[52] Tselev A, Gorbunov A, Pompe W. Cross-beam pulsed laser deposition: General characteristic[J]. Review of Scientific Instruments, 72, 2665-2672(2001).
[54] Jordan R, Cole D[J]. Lunney J G. Pulsed laser deposition of particulate-free thin films using a curved magnetic filter. Applied Surface Science, 109/110, 403-407(1997).
[55] Tsui Y Y, Minami H, Vick D et al. Debris reduction for copper and diamond-like carbon thin films produced by magnetically guided pulsed laser deposition[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 20, 744-747(2002).
[56] Cheng Y[M]. Technology of diamond-like carbon films prepared by pulsed laser deposition, 302-305(2017).
[57] Stafe M, Marcu A, Puscas N. Pulsed Laser Ablation of Solids Basics, Theory and Applications[M]. Heidelberg: Springer, 175-181(2014).
[58] Marcu A, Grigoriu C, Jiang W et al. Deposition parameters influences in pulsed laser deposition by plume reflection[J]. Proceedings of SPIE, 5227, 312-317(2003).
[59] Liimatainen J, Kekkonen V, Piirto J et al. Ultra short pulsed laser deposition technology for industrial applications[J]. Journal of Materials Science and Engineering B, 5, 196-205(2015).
[61] Huotari J, Kekkonen V, Puustinen J et al. Pulsed laser deposition for improved metal-oxide gas sensing layers[J]. Procedia Engineering, 168, 1066-1069(2016).
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Dai Shoujun, Yu Jin, Mo Zeqiang, Wang Jinduo, He Jianguo, Wang Xiaodong, Meng Jingjing, Wang Baopeng. Particulate Control Technology Based on Pulsed Laser Deposition[J]. Laser & Optoelectronics Progress, 2021, 58(1): 100004
Category: Reviews
Received: May. 26, 2020
Accepted: --
Published Online: Jan. 27, 2021
The Author Email: Jin Yu (jinyu@aoe.ac.cn)