Laser & Optoelectronics Progress, Volume. 58, Issue 1, 100004(2021)

Particulate Control Technology Based on Pulsed Laser Deposition

Dai Shoujun1,2, Yu Jin1,2、*, Mo Zeqiang1,2, Wang Jinduo1,2, He Jianguo1,2, Wang Xiaodong1,2, Meng Jingjing1,2, and Wang Baopeng1,2
Author Affiliations
  • 1Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, China
  • 2University of Chinese Academy of Sciences, Beijing 100049,China
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    Figures & Tables(13)
    Experimental set-up of the dual-laser deposition[31]
    Experimental set-up of the liquid-target PLD[22]
    Schematic diagram of ordinary circular scanning and oscillating scanning and their ablation trajectory diagram[20]. (a) Oscillating scanning; (b) scattered ablation trajectory; (c) ordinary circular scanning(the target rotates about its center); (d) annular ablation trajectory
    Experimental set-up of the cross dual-laser deposition[44]
    Experimental set-up of the collinear dual-laser deposition[45]
    Schematic illustration of the pulse picking mechanism[47]
    Schematic diagram of the picosecond pulse laser and three output pulse shapes[49]. (a) Schematic diagram of the picosecond pulse laser; (b)?(d) output pulse shapes at different voltage durations
    Schematic diagram of the experimental set-up for PLD, in which the velocity selector filter is inserted between the target and the substrate[30]. (a) Deposition process when the filter is in the initial state; (b) deposition process when the filter is in working state
    Experimental set-up of symmetric dual target PLD[52]
    Experimental set-up of the off-axis laser deposition[53]
    Schematic of the PLD with magnetic duct[54]
    Mask PLD experimental setup[57]
    Experimental setup for a PLD system using plasma reflection technique[57]
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    Dai Shoujun, Yu Jin, Mo Zeqiang, Wang Jinduo, He Jianguo, Wang Xiaodong, Meng Jingjing, Wang Baopeng. Particulate Control Technology Based on Pulsed Laser Deposition[J]. Laser & Optoelectronics Progress, 2021, 58(1): 100004

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    Paper Information

    Category: Reviews

    Received: May. 26, 2020

    Accepted: --

    Published Online: Jan. 27, 2021

    The Author Email: Jin Yu (jinyu@aoe.ac.cn)

    DOI:10.3788/LOP202158.0100004

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