Laser & Optoelectronics Progress, Volume. 58, Issue 1, 100004(2021)
Particulate Control Technology Based on Pulsed Laser Deposition
Fig. 1. Experimental set-up of the dual-laser deposition[31]
Fig. 2. Experimental set-up of the liquid-target PLD[22]
Fig. 3. Schematic diagram of ordinary circular scanning and oscillating scanning and their ablation trajectory diagram[20]. (a) Oscillating scanning; (b) scattered ablation trajectory; (c) ordinary circular scanning(the target rotates about its center); (d) annular ablation trajectory
Fig. 4. Experimental set-up of the cross dual-laser deposition[44]
Fig. 5. Experimental set-up of the collinear dual-laser deposition[45]
Fig. 6. Schematic illustration of the pulse picking mechanism[47]
Fig. 7. Schematic diagram of the picosecond pulse laser and three output pulse shapes[49]. (a) Schematic diagram of the picosecond pulse laser; (b)?(d) output pulse shapes at different voltage durations
Fig. 8. Schematic diagram of the experimental set-up for PLD, in which the velocity selector filter is inserted between the target and the substrate[30]. (a) Deposition process when the filter is in the initial state; (b) deposition process when the filter is in working state
Fig. 9. Experimental set-up of symmetric dual target PLD[52]
Fig. 10. Experimental set-up of the off-axis laser deposition[53]
Fig. 11. Schematic of the PLD with magnetic duct[54]
Fig. 12. Mask PLD experimental setup[57]
Fig. 13. Experimental setup for a PLD system using plasma reflection technique[57]
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Dai Shoujun, Yu Jin, Mo Zeqiang, Wang Jinduo, He Jianguo, Wang Xiaodong, Meng Jingjing, Wang Baopeng. Particulate Control Technology Based on Pulsed Laser Deposition[J]. Laser & Optoelectronics Progress, 2021, 58(1): 100004
Category: Reviews
Received: May. 26, 2020
Accepted: --
Published Online: Jan. 27, 2021
The Author Email: Jin Yu (jinyu@aoe.ac.cn)