Laser & Optoelectronics Progress, Volume. 58, Issue 1, 100004(2021)

Particulate Control Technology Based on Pulsed Laser Deposition

Dai Shoujun1,2, Yu Jin1,2、*, Mo Zeqiang1,2, Wang Jinduo1,2, He Jianguo1,2, Wang Xiaodong1,2, Meng Jingjing1,2, and Wang Baopeng1,2
Author Affiliations
  • 1Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, China
  • 2University of Chinese Academy of Sciences, Beijing 100049,China
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    Pulsed laser deposition has broad applications in scientific research and industry as a simple, versatile, and efficient film growth technology. The requirements for film quality are becoming more and more stringent in many high-tech applications. Reducing or eliminating the particulates inside and on the surface of a film has become an urgent problem. This paper introduces the source of particulates in pulsed laser deposition and discusses the advantages and disadvantages associated with various particulate control techniques. Finally, the trend of particulate control based on pulsed laser deposition is discussed.

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    Dai Shoujun, Yu Jin, Mo Zeqiang, Wang Jinduo, He Jianguo, Wang Xiaodong, Meng Jingjing, Wang Baopeng. Particulate Control Technology Based on Pulsed Laser Deposition[J]. Laser & Optoelectronics Progress, 2021, 58(1): 100004

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    Paper Information

    Category: Reviews

    Received: May. 26, 2020

    Accepted: --

    Published Online: Jan. 27, 2021

    The Author Email: Jin Yu (jinyu@aoe.ac.cn)

    DOI:10.3788/LOP202158.0100004

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