Spectroscopy and Spectral Analysis, Volume. 31, Issue 4, 1142(2011)
New Design of Grimm-Type Glow Discharge Source for Real-Time Sputtered Depth Measurement
[1] [1] Kenneth Marcus R, Jose Brokaert A C.Glow Discharge Plasmas in Analytical Spectroscopy.Chichester, West Sussex, England: John Wiley & Sons Ltd, 2003.
[2] [2] Payling R, Jones D G, Bengtson A.Glow Discharge Optical Emission Spectrometry.Chichester, West Sussex, England: John Wiley & Sons Ltd, 1997.
[3] [3] Michael R Winchester, Richard Payling.Spectrochimica Acta Part B 59, 2004: 607.
[4] [4] Ferreira N P, Strauss J A, Human H G C.Spectrochimica Acta, 1983, 38B: 899.
[5] [5] Chris Xhoffer, Henri Dillen.J.Anal.At.Spectrom, 2003, A18: 576.
[6] [6] Shimizu K, Habazaki H, Skeldon P, et al.Surface and Interface Analysis, 1999, 27: 998.
[7] [7] Hoffmann Volker, Dorka Roland, Wilken Ludger, et al.Surface and Interface Analysis, 2003, 35: 575.
[8] [8] Angeli Johann, BengtsonArne, Bogaerts Annemie, et al.J.Anal.At.Spectrum., 2003, 18: 670.
[9] [9] Bengtson A.Spectrochimica Acta, 1994, 49B(4): 411.
[10] [10] Matthew L Hartenstein, Kenneth R Marcus.Surface and Interface Analysis, 1999, 27: 962.
[11] [11] Wilken L, Hoffmann V, Wetzig K.Journal of Analytical Atomic Spectrometry, 2003, 18: 1133.
[12] [12] Boumans P W J M.Analytical Chemistry, 1972, 44(7): 1219.
[15] [15] Bogaerts A, Gijbels R.Spectrochimica Acta Part B 53, 1998: 437.
[17] [17] Grais K I, Eid M A, Al-AShkar E A, et al.The European Physical Journal Applied Physics, 2003, 21: 213.
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WAN Zhen-zhen, LI Xiao-jia, WANG Yong-qing, SUN Rong-xia, SHI Ning. New Design of Grimm-Type Glow Discharge Source for Real-Time Sputtered Depth Measurement[J]. Spectroscopy and Spectral Analysis, 2011, 31(4): 1142
Received: Aug. 11, 2010
Accepted: --
Published Online: May. 30, 2011
The Author Email: Zhen-zhen WAN (emailwanzhenzhen@126.com)
CSTR:32186.14.