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Spectroscopy and Spectral Analysis, Volume. 31, Issue 4, 1142(2011)

New Design of Grimm-Type Glow Discharge Source for Real-Time Sputtered Depth Measurement

WAN Zhen-zhen1,*... LI Xiao-jia1, WANG Yong-qing2, SUN Rong-xia2 and SHI Ning3 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    WAN Zhen-zhen, LI Xiao-jia, WANG Yong-qing, SUN Rong-xia, SHI Ning. New Design of Grimm-Type Glow Discharge Source for Real-Time Sputtered Depth Measurement[J]. Spectroscopy and Spectral Analysis, 2011, 31(4): 1142

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    Paper Information

    Received: Aug. 11, 2010

    Accepted: --

    Published Online: May. 30, 2011

    The Author Email: Zhen-zhen WAN (emailwanzhenzhen@126.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology