Acta Optica Sinica, Volume. 42, Issue 17, 1712001(2022)

Review of Research on Computer-Aided Deflectometric Measurement Technology

Zhendong Wu1, Daodang Wang1、*, Yang Ruan1, and Rongguang Liang2
Author Affiliations
  • 1College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, Zhejiang, China
  • 2James C. Wyant College of Optical Sciences, University of Arizona, Tucson 85721, Arizona, USA
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    Figures & Tables(23)
    Geometric model of deflectometric measurement. (a) Physical drawing; (b) schematic diagram
    Principle model of deflectometric surface measurement
    Reverse ray-tracing model[20]
    Projection screen shift model[17]
    Stereo deflectometry [21]
    Preknowledge model[29]
    Calibration method of flat mirror with markers [33]
    Experimental results of measured surface [35]. (a) Measurement result of ZYGO interferometer; (b) measurement result based on three-coordinate calibration; (c) measurement result after first-step correction; (d) measurement result after second-step correction; (e) residual error between measurement result after first-step correction and measurement result based on three-coordinate calibration; (f) residual error between measurement result after second-step correction and measurement result based on three-coordinate calibration
    Layout of on-axis geometry with beam splitter[38]
    Models of regional reconstruction method
    Architecture of D-UNet[54]
    Photo of experimental measurement with infinite deflectometric system[58]. (a) Tested convex spherical optic with 50-mm diameter aperture; (b) interferogram acquired with Zygo interferometer; (c) photo of infinite deflectometric system
    Computer-aided deflectometric system for reflective convex surface measurement[35]
    Annular steps[69]. (a) Photo of steps; (b) fringe pattern reflected by steps
    Measurement result of stained glass surface[70]
    Computer-aided deflectometric system for transmitted multisurface measurement[77]
    Reconstruction results of front and rear surfaces of freeform refractive lens[77]
    Experimental setup for microscopic deflectometric system[78]
    Schematic diagram of off-axis deflectometric microscope system[80]
    Comparison between measurement results obtained by off-axis deflectometric microscope system and Wyko profilometer[80]. (a) Surface roughness measured by off-axis deflectometric microscope system; (b) surface roughness measured by Wyko profilometer; (c) line profile comparison in x direction; (d) line profile comparison in y direction
    Schematic diagram of on-axis deflectometric microscope system[39]
    Flow chart of fringe decoding in instantaneous deflectometry[80-81]
    Fringe coding process in instantaneous deflectometry based on frequency carrier[86]
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    Zhendong Wu, Daodang Wang, Yang Ruan, Rongguang Liang. Review of Research on Computer-Aided Deflectometric Measurement Technology[J]. Acta Optica Sinica, 2022, 42(17): 1712001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 11, 2022

    Accepted: Jun. 30, 2022

    Published Online: Sep. 16, 2022

    The Author Email: Wang Daodang (wangdaodang@sina.com)

    DOI:10.3788/AOS202242.1712001

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