Optics and Precision Engineering, Volume. 31, Issue 2, 141(2023)

Preparation of EUV Filter at 17.1 nm

Xiaoqian NIU1...2, Pengfei MIAO3, Hanlin WANG1,2, Xiaodong WANG1 and Bo CHEN1,* |Show fewer author(s)
Author Affiliations
  • 1Changchun Institute of Optics,Fine Mechanicsand Physics,Chinese Academy of Sciences, Changchun3003, China
  • 2University of Chinese Academy of Sciences, Beijing100190, China
  • 3Shanghai Institute of Satellite Engineering, Shanghai200240, China
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    Xiaoqian NIU, Pengfei MIAO, Hanlin WANG, Xiaodong WANG, Bo CHEN. Preparation of EUV Filter at 17.1 nm[J]. Optics and Precision Engineering, 2023, 31(2): 141

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    Paper Information

    Category: Modern Applied Optics

    Received: May. 11, 2022

    Accepted: --

    Published Online: Feb. 9, 2023

    The Author Email: CHEN Bo (chenb@ciomp.ac.cn)

    DOI:10.37188/OPE.20233102.0141

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