Optics and Precision Engineering, Volume. 31, Issue 2, 141(2023)
Preparation of EUV Filter at 17.1 nm
Fig. 2. Absorption coefficient and trasmission of different materials
Fig. 7. Surface topography of mesh-support filter under microscope
Fig. 10. Comparison between simulated transmission and measured transmission of filter
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Xiaoqian NIU, Pengfei MIAO, Hanlin WANG, Xiaodong WANG, Bo CHEN. Preparation of EUV Filter at 17.1 nm[J]. Optics and Precision Engineering, 2023, 31(2): 141
Category: Modern Applied Optics
Received: May. 11, 2022
Accepted: --
Published Online: Feb. 9, 2023
The Author Email: CHEN Bo (chenb@ciomp.ac.cn)