Optics and Precision Engineering, Volume. 31, Issue 2, 141(2023)

Preparation of EUV Filter at 17.1 nm

Xiaoqian NIU1...2, Pengfei MIAO3, Hanlin WANG1,2, Xiaodong WANG1 and Bo CHEN1,* |Show fewer author(s)
Author Affiliations
  • 1Changchun Institute of Optics,Fine Mechanicsand Physics,Chinese Academy of Sciences, Changchun3003, China
  • 2University of Chinese Academy of Sciences, Beijing100190, China
  • 3Shanghai Institute of Satellite Engineering, Shanghai200240, China
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    Figures & Tables(15)
    Schematic of transmission filter
    Absorption coefficient and trasmission of different materials
    Transmission of 150 nm Al in visible
    Transmission of Al with different thicknesses
    Preparation of filter
    Al filter sample with mesh supported
    Surface topography of mesh-support filter under microscope
    Comparison between the transmission of ESP and sample
    [in Chinese]
    Comparison between simulated transmission and measured transmission of filter
    XPS survey of the Al film on the surfaces
    Pinholes on the surface of a filter
    Transmission of the filter in visible region
    • Table 1. [in Chinese]

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      Table 1. [in Chinese]

      TimeRoughness/nmThickness of oxide layer/nmTransmission at 17.1 nm/%
      Day12.565.5245.35
      Day22.776.4642.75
      Day32.726.6142.34
    • Table 2. Atomic ratio on the surface of the thin films

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      Table 2. Atomic ratio on the surface of the thin films

      NamePeak BEHeight CPSFWHM/eVArea(P) CPS/eVAtomic/%
      O1s531.41 193 5164.035 098 38532.98
      N1s400.053 6424.8930 055.320.31
      C1s284.95155 897.34.18746 587.312.12
      Al2s118.22289 219.54.871 480 89227.8
      Al2p73.36204 248.54.861 016 99826.79
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    Xiaoqian NIU, Pengfei MIAO, Hanlin WANG, Xiaodong WANG, Bo CHEN. Preparation of EUV Filter at 17.1 nm[J]. Optics and Precision Engineering, 2023, 31(2): 141

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    Paper Information

    Category: Modern Applied Optics

    Received: May. 11, 2022

    Accepted: --

    Published Online: Feb. 9, 2023

    The Author Email: CHEN Bo (chenb@ciomp.ac.cn)

    DOI:10.37188/OPE.20233102.0141

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