Optics and Precision Engineering, Volume. 19, Issue 1, 17(2011)

Measurement of thickness of metal thin film by using chromatic confocal spectral technology

MA Xiao-jun*, GAO Dang-zhong, YANG Meng-sheng, ZHAO Xue-sen, YE Cheng-gang, and TANG Yong-jian
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  • [in Chinese]
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    MA Xiao-jun, GAO Dang-zhong, YANG Meng-sheng, ZHAO Xue-sen, YE Cheng-gang, TANG Yong-jian. Measurement of thickness of metal thin film by using chromatic confocal spectral technology[J]. Optics and Precision Engineering, 2011, 19(1): 17

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    Paper Information

    Received: Apr. 30, 2010

    Accepted: --

    Published Online: Mar. 28, 2011

    The Author Email: Xiao-jun MA (wildhorseyun@yahoo.com.cn)

    DOI:

    CSTR:32186.14.

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