Optics and Precision Engineering, Volume. 19, Issue 1, 17(2011)
Measurement of thickness of metal thin film by using chromatic confocal spectral technology
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MA Xiao-jun, GAO Dang-zhong, YANG Meng-sheng, ZHAO Xue-sen, YE Cheng-gang, TANG Yong-jian. Measurement of thickness of metal thin film by using chromatic confocal spectral technology[J]. Optics and Precision Engineering, 2011, 19(1): 17
Paper Information
Received: Apr. 30, 2010
Accepted: --
Published Online: Mar. 28, 2011
The Author Email: Xiao-jun MA (wildhorseyun@yahoo.com.cn)
CSTR:32186.14.
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