Optics and Precision Engineering, Volume. 20, Issue 12, 2704(2012)

Suppression of positioning noise of precision air bearing stage based on abdominal and passive damper

ZHANG Shan1、* and WANG Lei2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(15)

    [1] [1] LIU J B, XUE H, GU W Q. Precision Stage Technology Used in Micro/nano-Fabrication [M]. Beijing: Beijing University of Technology Press, 2004: 205-272. (in Chinese)

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    [3] [3] SEUNG-KOOK R, SOOHYUN K, YOONKEUN K, et al.. A linear air bearing stage with active magnetic preloads for ultraprecise straight motion [J]. Precision Engineering, 2010, 34(1):186-194.

    [4] [4] KENJI K, TAKESHI A, KOTARO T, et al.. Development of coarse/fine dual stage using pneumatically driven bellows actuator and cylinder with air bearings [J]. Precision Engineering, 2010, 34(3):526-533.

    [7] [7] ZHANG W, LI D SH, YU J, et al.. Capacitive measuring method of air-film thickness of aerostatic bearing [J]. Transducer and Microsystem Technologies, 2012,31(7):67-69. (in Chinese)

    [8] [8] JIA S T, ZHU Y, YANG K M, et al.. Design of disturbance observer for ultra-precision stages [J]. Microfabrication Technology, 2007,(4):39-42. (in Chinese)

    [9] [9] WANG G L, LI SH Y, SU SH P. A study on aerostatic slider with high stiffness and high damping for ultraprecision applications [J]. Aviation Precision Manufacturing Technology, 2001, 37(6):1-5. (in Chinese)

    [10] [10] SHINNO H,HASHIZUME H. Nanometer positioning of a linear motor-driven ultraprecision aerostatic table system with electrorheological fluid dampers [J]. Annals of the CIRP, 1999,48(1):289-292.

    [11] [11] GEORGE E. Control System Design Guide [M]. Beijing:Publishing house of electronics industry, 2006: 95-112. (in Chinese)

    [12] [12] CAI T, ZHANG M, ZHU Y, et al.. Dynamic modeling and analysis of a 3-DOF ultra-precision positioning stage with air bearing [J]. Procedia Engineering, 2011,16:264-270.

    [13] [13] YUSAKU FUJII, KOICHI MARU, TAO JIN. Method for evaluating the electrical and mechanical characteristics of a voice coil actuator [J]. Precision Engineering, 2010, 34(4):802-806.

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    ZHANG Shan, WANG Lei. Suppression of positioning noise of precision air bearing stage based on abdominal and passive damper[J]. Optics and Precision Engineering, 2012, 20(12): 2704

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    Paper Information

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    Received: Oct. 8, 2012

    Accepted: --

    Published Online: Jan. 7, 2013

    The Author Email: Shan ZHANG (zhangshan212@gmail.com)

    DOI:10.3788/ope.20122012.2704

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