Optics and Precision Engineering, Volume. 20, Issue 12, 2704(2012)
Suppression of positioning noise of precision air bearing stage based on abdominal and passive damper
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ZHANG Shan, WANG Lei. Suppression of positioning noise of precision air bearing stage based on abdominal and passive damper[J]. Optics and Precision Engineering, 2012, 20(12): 2704
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Received: Oct. 8, 2012
Accepted: --
Published Online: Jan. 7, 2013
The Author Email: Shan ZHANG (zhangshan212@gmail.com)
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