Fig. 1. Structure and physical image of the IZO TFT. (a) Structure of the IZO TFT; (b) Physical image of the IZO TFT

Fig. 2. AFM and XRD images of the IZO thin films. (a) AFM; (b) XRD

Fig. 3. Electrical properties of a type IZO TFT. (a) Output characteristics; (b) Transfer characteristics

Fig. 4. Electrical characteristics of IZO TFT prepared at different ratios of argon to oxygen gas flow. (a) Transfer characteristics;(b) µ_sat and SS; (c) V_th and I_on/I_off

Fig. 5. Electrical characteristics of IZO TFT prepared under different sputtering gas pressures. (a) Transfer characteristics; (b) µ_sat and SS ; (c) V_th and I_on/I_off

Fig. 6. Transfer characteristic curves of IZO TFT under different annealing temperatures