[1] [1] MINH D N,KORAY KNGUY K, et al.. Piezoelectric materials for MEMS applications[C]. 3rd IEEE Int. Conf. NAMS,2008:315-318.

[2] [2] BATHURST S,LEE H W,KIM S G. Direct printing of lead zirconate titanate thin films for microelectromechanical systems[C]. MEMS 2008, Tucson, AZ, USA, January 13-17, 2008.

[3] [3] ROMAIN H,DAVID J, et al.. A silicon cantilever beam structure for the evaluation of d31, d33 and e31 piezoelectric coefficients of PZT thin films[C]. Applications of ferroelectrics, 2007. ISAF. 16th IEEE Int. Sym. 2007:725-727.

[4] [4] ISAKU K,TAKAAKI K. Development of deformable mirror composed of piezoelectric thin films for adaptive optics[J]. IEEE. J. selected topics in quantum electronics, 2007,13(2):155-11.

[5] [5] XU X H, FENG Y, LIU SH, et al.. Fabricationand characterization of PZT thick film actuators array for MEMS deformable mirror[J]. Nanotechnology and Precision Engineering, 2007,5(4):261-265. (in Chinese)

[6] [6] AKASE K,SAWADA R, et al.. Combined device of optical microdisplacement sensor and PZT-Actuated micromirror[J]. IEEE, 2007:199-200.

[7] [7] LOU L F, YANG Y T, LI Y J, et al.. Structural designand testing of silicon-based PZT thin film micro-sensors[J]. Chinese Journal of Semiconductors, 2007,28(5):778-782.

[8] [8] WU Y L, WU Y J, ZHU L Y, et al.. Mathematical model of all-fiber phase modulators with lead zirconate titanate coating[J]. Opt. Precision Eng., 2007,15(2):230-236. (in Chinese)

[9] [9] CHEN H CH. Dynamical research on spherical micro actuator with PZT drivers[J]. Opt. Precision Eng., 2007,15(2):248-253. (in Chinese)

[10] [10] WANG W, LIU X W, CH W P,et al.. CHEN Wei-ping, Piezoelectric diaphragm used in micropump based on its design and optimization[J]. Piezoelectrics & Acoustooptics,2006,28(2):153-155. (in Chinese)

[11] [11] WANG W, LIU X W, LAN M J,et al.. Capability test of PZT piezoelectric thick film compatible with MEMS[J]. Opt.Precision Eng., 2004,12(3):72-75. (in Chinese)

[12] [12] WANG W, TIAN L, BAO ZH Y, et al.. Research and Fabrication of a Bi-directional Piezoelectric micropump[J]. Chinese Journal of Sensors and Actuator, 2006,19(5):2018-2021