Optics and Precision Engineering, Volume. 17, Issue 3, 583(2009)
PZT piezoelectric function structure on silicon substrate
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WANG Wei, TIAN Li, LIU Xiao-wei, REN Ming-yuan, ZHANG Ying. PZT piezoelectric function structure on silicon substrate[J]. Optics and Precision Engineering, 2009, 17(3): 583
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Received: May. 26, 2008
Accepted: --
Published Online: Oct. 28, 2009
The Author Email: Wei WANG (wangweihit@hit.edu.cn)
CSTR:32186.14.
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