Optics and Precision Engineering, Volume. 32, Issue 13, 2040(2024)
Error analysis and correction of surface inclination angle of non-coaxial parallel chromatic confocal measurement system
Figures & Tables(22)
Fig. 1. Principle of oblique illumination chromatic confocal measurement system
Fig. 2. Distribution of spectral light intensity at different wavelengths
Fig. 6. Schematic diagram of non-coaxial chromatic confocal measurement system
Fig. 17. Results before and after compensation for different tilt angles
Table 1. Components used in experimental setup
View tableView in ArticleTable 1. Components used in experimental setup
器件 制造商 作用 光源 海洋光学；HL-2000-FHSA 多色光源 色散管透镜 自制；轴向线性色散范围：160 mm 产生色散 物镜 麦克奥迪；放大倍数：10×， 数值孔径：0.25 放大和聚焦光线 二维移动平台 大恒光电；GCM-T25MC 提供X和Y方向的位移 旋转台 大恒光电；GCM-1101M 提供样品表面倾斜角度 电感测微仪 Tesa； TT80 完成样品位移精密测量 彩色相机 巴斯勒；a2A5320-23ucBAS 接收光信号
Table 2. Calibration experimental data without tilt angle
View tableView in ArticleTable 2. Calibration experimental data without tilt angle
序号 轴向位移/μm H值 序号 轴向位移/μm H值 1 0 26.98 12 550 42.29 2 50 25.47 13 600 46.94 3 100 24.95 14 650 53.11 4 150 25.93 15 700 61.51 5 200 26.19 16 750 70.90 6 250 27.47 17 800 80.60 7 300 29.14 18 850 89.19 8 350 30.55 19 900 95.85 9 400 32.64 20 950 99.89 10 450 35.34 21 1 000 102.82 11 500 38.49
Table 3. Calibration experimental data for surface inclination
View tableView in ArticleTable 3. Calibration experimental data for surface inclination
序号 轴向位移/μm H值 序号 轴向位移/μm H值 1 0 27.30 12 550 61.33 2 50 28.24 13 600 69.43 3 100 29.51 14 650 77.54 4 150 30.85 15 700 85.53 5 200 32.71 16 750 91.48 6 250 34.72 17 800 96.02 7 300 37.36 18 850 99.57 8 350 40.39 19 900 102.93 9 400 44.20 20 950 105.35 10 450 48.84 21 1 000 109.08 11 500 54.32
Table 4. Experimental results of step measurement and step height calculation
View tableView in ArticleTable 4. Experimental results of step measurement and step height calculation
序号 横向位移/μm H值 高度测量值/μm 1.10 mm量块 1.20 mm量块 1 0 71.23 53.10 99.39 2 100 71.34 53.43 98.20 3 200 70.98 52.98 98.66 4 300 71.07 52.85 99.84 5 400 71.15 52.97 99.65 6 500 71.44 53.18 100.04 7 600 71.49 53.13 100.64 8 700 71.15 53.04 99.26 9 800 71.33 53.20 99.40 10 900 71.48 53.25 99.91 11 1000 71.47 53.49 98.54 高度测量平均值/μm 99.41 相对误差 0.46%
Table 5. Experimental results and compensation results of inclined steps
View tableView in ArticleTable 5. Experimental results and compensation results of inclined steps
序号 横向位移/μm H值 补偿后高度/μm 1.10 mm量块 1.20 mm量块 1 0 67.76 51.72 102.87 2 100 69.80 53.69 103.15 3 200 70.52 54.74 101.02 4 300 71.68 55.91 100.83 5 400 73.93 57.29 102.83 6 500 75.03 59.18 101.14 7 600 76.19 60.19 102.03 8 700 78.03 62.42 99.42 9 800 79.43 63.61 100.71 10 900 80.55 64.06 104.84 11 1000 81.89 65.78 102.29 高度测量平均值/μm 101.92 相对误差 3.00%
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Shushu LI, Qing YU, Yaozu ZHANG, Wei ZHANG, Yin WANG, Ting LIU, Weifeng ZHENG, Lina LI. Error analysis and correction of surface inclination angle of non-coaxial parallel chromatic confocal measurement system[J]. Optics and Precision Engineering, 2024, 32(13): 2040
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Received: Jan. 9, 2024
Accepted: --
Published Online: Aug. 28, 2024
The Author Email: YU Qing (yuqing@hqu.edu.cn)
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