Optics and Precision Engineering, Volume. 32, Issue 13, 2040(2024)
Error analysis and correction of surface inclination angle of non-coaxial parallel chromatic confocal measurement system
This paper presents a method to compensate for measurement errors in a non-coaxial parallel chromatic confocal system caused by the inclination angle of the surface being measured. The approach involves constructing steps using two standard measuring blocks as test objects. First, the sample is moved laterally, and the collected surface height data is fitted to a straight line to derive the linear formula for the tilted surface. The slope of this line is then used to determine the surface tilt angle, and a trigonometric relationship calculates the error value for each data point. Finally, these errors are corrected through compensation. To ensure adequate spectral signal capture by the color camera, the object's tilt angle is maintained within [-4°, 4°]. Experiments are conducted within this range at various tilt angles, with an example at 4° showing an average measured step height of 101.92 μm after compensation, resulting in a relative error of 3.00%. The system's measurement accuracy achieves micrometer-level precision.
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Shushu LI, Qing YU, Yaozu ZHANG, Wei ZHANG, Yin WANG, Ting LIU, Weifeng ZHENG, Lina LI. Error analysis and correction of surface inclination angle of non-coaxial parallel chromatic confocal measurement system[J]. Optics and Precision Engineering, 2024, 32(13): 2040
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Received: Jan. 9, 2024
Accepted: --
Published Online: Aug. 28, 2024
The Author Email: YU Qing (yuqing@hqu.edu.cn)