Semiconductor Optoelectronics, Volume. 41, Issue 5, 681(2020)
Analysis and Improvement of the Graphic Distortion in Mask Copying Process
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SHU Mingyang, ZHOU Wen, CHEN Donghao. Analysis and Improvement of the Graphic Distortion in Mask Copying Process[J]. Semiconductor Optoelectronics, 2020, 41(5): 681
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Received: Apr. 8, 2020
Accepted: --
Published Online: Jan. 19, 2021
The Author Email: Mingyang SHU (smy7151@126.com)
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