Microelectronics, Volume. 53, Issue 4, 730(2023)
Effect of Phosphorus and Arsenic Injection on Static Parameters of Trench MOSFET
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HU Weiran, FENG Quanyuan. Effect of Phosphorus and Arsenic Injection on Static Parameters of Trench MOSFET[J]. Microelectronics, 2023, 53(4): 730
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Received: Nov. 23, 2022
Accepted: --
Published Online: Jan. 3, 2024
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