Spectroscopy and Spectral Analysis, Volume. 44, Issue 12, 3301(2024)
Methods of Processing XPS Data for Calculating Film Thickness
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LIU Han, CHEN Meng. Methods of Processing XPS Data for Calculating Film Thickness[J]. Spectroscopy and Spectral Analysis, 2024, 44(12): 3301
Received: Sep. 21, 2023
Accepted: Jan. 16, 2025
Published Online: Jan. 16, 2025
The Author Email: Meng CHEN (chenmeng@fudan.edu.cn)