Spectroscopy and Spectral Analysis, Volume. 44, Issue 12, 3301(2024)

Methods of Processing XPS Data for Calculating Film Thickness

LIU Han and CHEN Meng*
Author Affiliations
  • Department of Materials Science, Fudan University, Shanghai 200433, China
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    LIU Han, CHEN Meng. Methods of Processing XPS Data for Calculating Film Thickness[J]. Spectroscopy and Spectral Analysis, 2024, 44(12): 3301

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    Paper Information

    Received: Sep. 21, 2023

    Accepted: Jan. 16, 2025

    Published Online: Jan. 16, 2025

    The Author Email: Meng CHEN (chenmeng@fudan.edu.cn)

    DOI:10.3964/j.issn.1000-0593(2024)12-3301-05

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