Spectroscopy and Spectral Analysis, Volume. 44, Issue 12, 3301(2024)

Methods of Processing XPS Data for Calculating Film Thickness

LIU Han and CHEN Meng*
Author Affiliations
  • Department of Materials Science, Fudan University, Shanghai 200433, China
  • show less
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    LIU Han, CHEN Meng. Methods of Processing XPS Data for Calculating Film Thickness[J]. Spectroscopy and Spectral Analysis, 2024, 44(12): 3301

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Sep. 21, 2023

    Accepted: Jan. 16, 2025

    Published Online: Jan. 16, 2025

    The Author Email: Meng CHEN (chenmeng@fudan.edu.cn)

    DOI:10.3964/j.issn.1000-0593(2024)12-3301-05

    Topics