Fig. 1. Structure of planar two-dimensional time-grating displacement sensor

Fig. 2. Planar diagram of induction and excitation windings

Fig. 3. Distribution of induction winding of moving ruler

Fig. 4. Distribution of induction windings judged by dimension

Fig. 5. Schematic diagram of binarization of dimensional judgment induced signals

Fig. 6. Distribution of induction windings in X direction

Fig. 7. Two-dimensional displacement measurement scheme

Fig. 8. Cloud map of magnetic field distribution in simulation model

Fig. 9. Induction signals of induction windings at different positions

Fig. 10. Wide-range measurement error of X direction

Fig. 11. Wide-range measurement error of Y direction

Fig. 12. Wide-range error spectrum

Fig. 13. Fixed and moving scales of sensors

Fig. 14. Experimental platform for planar two-dimensional time grating displacement measurement

Fig. 15. Stability error curve of X direction

Fig. 16. Stability error curve of Y direction

Fig. 17. Measurement value within 120 mm×120 mm

Fig. 18. Measurement errors within full range of X direction

Fig. 19. Measurement errors within full range of Y direction

Fig. 20. Harmonic spectrum of original measurement errors within full range

Fig. 21. Sensor resolution test data