Optics and Precision Engineering, Volume. 32, Issue 17, 2612(2024)

Displacement sensing mechanism and measurement model of planar two-dimensional time-grating based on alternating magnetic field

Ziran CHEN1...2,3,4, hui OUYang1,3, Hengxiao ZHANG1,3, Kai PENG1,3,*, Wei WANG1,3, and Nanchuan CUI13 |Show fewer author(s)
Author Affiliations
  • 1Engineering Research Center of Mechanical Testing Technology and Equipment, Ministry of Education, Chongqing University of Technology, Chongqing400054, China
  • 2CCTEG Chongqing Research Institute, Chongqing400039, China
  • 3Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology, Chongqing400054, China
  • 4College of Optoelectronic Engineering, Chongqing University, Chongqing00039, China
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    To address the limitations of traditional planar two-dimensional displacement sensors in ultra-precision lithography and large-area sensor manufacturing, a new method using a spatial alternating magnetic field is proposed. This method involves arranging uniform sine/cosine excitation windings on a fixed ruler and applying time-quadrature electric current to these windings, creating a two-dimensional alternating magnetic field that links spatial displacement with a time reference. The method achieves spatial displacement measurement through a model of "dimension judgment + displacement decoupling." Dimension judgment is performed using the binary output signals from a dimension-judgment induction winding array. The alternating magnetic field is detected by a displacement-decoupling induction winding array arranged in two dimensions, producing spatial traveling-wave signals and enabling displacement decoupling via phase comparison. Error analysis of this two-dimensional time-grating displacement measurement model was conducted through electromagnetic simulation. A prototype and experimental platform were developed, demonstrating that within a 120 mm × 120 mm range, the maximum measurement errors were ±9.4 µm in the X direction and ±9.7 µm in the Y direction, with a resolution of 0.15 µm. This method achieves micron-level measurement accuracy using millimeter-sized excitation and induction windings, overcoming the limitations of traditional sensors in ultra-precision lithography and simplifying sensor manufacturing. The research holds significant theoretical and practical value.

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    Ziran CHEN, hui OUYang, Hengxiao ZHANG, Kai PENG, Wei WANG, Nanchuan CUI. Displacement sensing mechanism and measurement model of planar two-dimensional time-grating based on alternating magnetic field[J]. Optics and Precision Engineering, 2024, 32(17): 2612

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    Paper Information

    Category: Precision Measurement and Sensing

    Received: Feb. 27, 2024

    Accepted: --

    Published Online: Nov. 18, 2024

    The Author Email: PENG Kai (pk@cqut.edu.cn)

    DOI:10.37188/OPE.20243217.2612

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