Optics and Precision Engineering, Volume. 19, Issue 8, 1845(2011)

Development of non-perpendicular 2D MEMS tilt mirrors

ZHUANG Xu-ye1,*... WANG Wei-min1, TAO Feng-gang1,2, YAO Jun1 and GAO Fuhua3 |Show fewer author(s)
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    References(12)

    [1] [1] JUSTIN D M, SUPRIYO S, ROBERT L. BYER, et al.. Deformable mirror development at stanford university [J]. SPIE, 2002,4493: 1-12.

    [3] [3] BIFANO T,CORNELISSEN S, BIERDEN P. MEMS deformable mirrors in astronomical adaptive optica [J]. 1st AO4ELT conference, 2010: 06003.

    [4] [4] LI S H, LIU Y F, GAO X. Analysis and fabrication of torsion micromirror actuators based on a MEMS technology [J].Chinese Journal of Semiconductors, 2006,27(4): 756-760. (in Chinese)

    [5] [5] ZHANG Y, PAN W. Design and analysis of a MEMS horizontal torsion micro mirror with folded springs[J]. Opt. Precision Eng., 2005, Z1: 81-85. (in Chinese)

    [6] [6] MA W Y, YAO J, REN H, et al.. Design and analysis of MEMS 2D electrostatic scanning mirrors[J]. Micronanoelectronic Technology, 2009,46(5): 296-300. (in Chinese)

    [7] [7] MU C J, ZHAO B G, WU Y M. Study on dynamic deformations of high speed MEMS scanning micro-mirror [J].Chinese Journal of Sensors and Actuators, 2008,21(4): 640-643. (in Chinese)

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    [10] [10] NEMIROVSKY Y,BOCHOBZA-DEGANI O. A methodology and model for the pull-in parameters of electrostatic actuators [J]. J. Microelectromech.Syst.,2001,10(4): 601-615.

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    ZHUANG Xu-ye, WANG Wei-min, TAO Feng-gang, YAO Jun, GAO Fuhua. Development of non-perpendicular 2D MEMS tilt mirrors[J]. Optics and Precision Engineering, 2011, 19(8): 1845

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    Paper Information

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    Received: Dec. 7, 2010

    Accepted: --

    Published Online: Aug. 29, 2011

    The Author Email: Xu-ye ZHUANG (zxye8888@hotmail.com)

    DOI:10.3788/ope.20111908.1845

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