Optics and Precision Engineering, Volume. 19, Issue 8, 1845(2011)
Development of non-perpendicular 2D MEMS tilt mirrors
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ZHUANG Xu-ye, WANG Wei-min, TAO Feng-gang, YAO Jun, GAO Fuhua. Development of non-perpendicular 2D MEMS tilt mirrors[J]. Optics and Precision Engineering, 2011, 19(8): 1845
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Received: Dec. 7, 2010
Accepted: --
Published Online: Aug. 29, 2011
The Author Email: Xu-ye ZHUANG (zxye8888@hotmail.com)