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Optics and Precision Engineering, Volume. 19, Issue 8, 1845(2011)

Development of non-perpendicular 2D MEMS tilt mirrors

ZHUANG Xu-ye1,*... WANG Wei-min1, TAO Feng-gang1,2, YAO Jun1 and GAO Fuhua3 |Show fewer author(s)
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    ZHUANG Xu-ye, WANG Wei-min, TAO Feng-gang, YAO Jun, GAO Fuhua. Development of non-perpendicular 2D MEMS tilt mirrors[J]. Optics and Precision Engineering, 2011, 19(8): 1845

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    Received: Dec. 7, 2010

    Accepted: --

    Published Online: Aug. 29, 2011

    The Author Email: Xu-ye ZHUANG (zxye8888@hotmail.com)

    DOI:10.3788/ope.20111908.1845

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology