Acta Optica Sinica, Volume. 34, Issue 9, 905003(2014)
Effect of Period Setting Value on Printed Phase in Scanning Beam Interference Lithography System
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Jiang Shan, Bayanheshig, Li Wenhao, Song Ying, Pan Mingzhong. Effect of Period Setting Value on Printed Phase in Scanning Beam Interference Lithography System[J]. Acta Optica Sinica, 2014, 34(9): 905003
Paper Information
Category: Diffraction and Gratings
Received: Mar. 17, 2014
Accepted: --
Published Online: Aug. 12, 2014
The Author Email: Shan Jiang (jiangshan0122@126.com)
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