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Acta Optica Sinica, Volume. 34, Issue 9, 905003(2014)

Effect of Period Setting Value on Printed Phase in Scanning Beam Interference Lithography System

Jiang Shan1,2、*, Bayanheshig1, Li Wenhao1, Song Ying1,2, and Pan Mingzhong1
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    Article index updated: Jun. 7, 2024

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    Jiang Shan, Bayanheshig, Li Wenhao, Song Ying, Pan Mingzhong. Effect of Period Setting Value on Printed Phase in Scanning Beam Interference Lithography System[J]. Acta Optica Sinica, 2014, 34(9): 905003

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    Paper Information

    Category: Diffraction and Gratings

    Received: Mar. 17, 2014

    Accepted: --

    Published Online: Aug. 12, 2014

    The Author Email: Shan Jiang (jiangshan0122@126.com)

    DOI:10.3788/aos201434.0905003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology