Journal of Applied Optics, Volume. 44, Issue 3, 533(2023)

Simulation and error analysis of illumination system with coherent noise suppression

Xianhao QI1... Sen HAN1,2,*, Linghua ZHANG1,2, Xianyu WU1, Jun CHENG1 and Xiaoyue BIAN3 |Show fewer author(s)
Author Affiliations
  • 1School of Optical-electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 2Suzhou H&L Instruments LLC, Suzhou 215123, China
  • 3School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou 215009, China
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    References(9)

    [1] [1] DECK L L, STEPHENSON D, GRATIX E J, et al. Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometer: US, US6643024 B2[P]. 2003.

    [2] [2] XU Yan, WU Yongqian, LI Shifang, et al Error analysis of ring light source based on ZEMAX interferometer modeling [J] Opto-Electric Engineering, 2015, 42 (2): 5.

    [4] [4] WANG Lujia Design and research of ring light source in Fizeau interference system [D]. Nanjing : Nanjing University of Science & Technology, 2012.

    [5] [5] YU Yi Research on Zygo interferometer and its application [D]. Tianjin: Tianjin University, 2005.

    [6] [6] ZHANG Jiaying Research on coherent noise suppression technology of high-precision interferometer [D]. Xi'an: Xi'an University of Technology, 2018.

    [7] [7] WANG Yangchun Evaluation of calculation accuracy of non sequential ray tracing program [D]. Hangzhou: Zhejiang University, 2006.

    [8] [8] KIMBROUGH B T. Path matched vibration insensitive Fizeau interferometer [D]. Arizona: The University of Arizona., 2006.

    [9] [9] ZHU Rihong, CHEN Lei, WANG Qing, et al Phase shift interferometry and its application [J]. Journal of Applied Optics, 2006, 27 (2): 85-88.

    [10] [10] DAI Jie Error analysis and research of 3D imaging system based on PMP digital fringe projection [D]. Tianjin: Hebei University of Technology, 2011.

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    Xianhao QI, Sen HAN, Linghua ZHANG, Xianyu WU, Jun CHENG, Xiaoyue BIAN. Simulation and error analysis of illumination system with coherent noise suppression[J]. Journal of Applied Optics, 2023, 44(3): 533

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    Paper Information

    Category: Research Articles

    Received: Jul. 18, 2022

    Accepted: --

    Published Online: Jun. 19, 2023

    The Author Email: HAN Sen (senhanemail@126.com)

    DOI:10.5768/JAO202344.0301009

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