Fig. 1. Schematic of interferometry of off-axis point light source

Fig. 2. Schematic of interferometry of off-axis toroidal light source

Fig. 3. Illumination system with coherent noise suppression

Fig. 4. Diagram of light received on CCD

Fig. 5. Interferogram in different lighting modes

Fig. 6. Relationship between ring thickness and stripe contrast

Fig. 7. Spot diagram of double-telecentric light group image square

Fig. 8. Relationship between interference cavity length and stripe contrast

Fig. 9. Relationship between interference cavity length and stripe contrast