Optics and Precision Engineering, Volume. 20, Issue 11, 2395(2012)

Developments of DUV coating technologies in CIOMP

ZHANG Li-chao1、* and GAO Jin-song2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(11)

    [1] [1] BURNING J H.Optical Lithography: 40 years and holding [J]. SPIE,2007,6520:652004-1-13.

    [2] [2] THOMAS S, TOBIAS B, HOACHIM H, et al.. DUV-microscopy objectives: technology driver that forces the production to switch from the micrometer scale to the nanometer scale [J]. SPIE,2005,5965:59651H.

    [3] [3] MCCLAY J, DEMARCO M, FAHEYWELZEL U, et al.. SVG 157-nm lithography approach [J]. SPIE,2000,4000:1582-1589.

    [4] [4] TOSHIYA Y, KEIJI N, KEIICHI S, et al.. Fluoride coatings for DUVVUV optics fabricated by Ion Beam Sputtering method [C]. Optical Interference Coatings, 2004.

    [5] [5] GUNSTER S, GORTZ B, RISTAU D, et al.. IBS deposition of dense fluoride coatings for the vacuum ultraviolet free electron laser[J]. SPIE,2005:59630L.

    [6] [6] YING W, YUEGUANG Z, WEILAN S, et al.. Optical properties and residual stress of YbF3 thin films deposited at different temperatures [J]. Appl. Opt., 2008, 47(13): 319-323.

    [7] [7] MONTCALM C. Reduction of residual stress in extreme ultraviolet Mo/Si multilayer mirrors with postdeposition thermal treatments [J]. Opt. Eng., 2001, 40(3): 469-477.

    [8] [8] WELZEL U, LIGOT J, LAMPARTER P, et al.. Stress analysis of polycrystalline thin films and surface regions by X-ray diffraction [J]. J. Appl. Crystallography, 2005, 38(1): 1-29.

    [9] [9] ZHANG L CH. Accurate determination of thicknesses for nanometer thin films [J]. OME Information, 2010,27(10):45-49 .(in Chinese)

    [11] [11] ZHANG L CH. Calibration of deposition rates of multilayer coatings by sputtering depositions [J]. Opt. Precision Eng., 1997, 5(1): 133-141. (in Chinese)

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    ZHANG Li-chao, GAO Jin-song. Developments of DUV coating technologies in CIOMP[J]. Optics and Precision Engineering, 2012, 20(11): 2395

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    Paper Information

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    Received: Sep. 7, 2012

    Accepted: --

    Published Online: Nov. 28, 2012

    The Author Email: Li-chao ZHANG (lichaod@yahoo.com.cn)

    DOI:10.3788/ope.20122011.2395

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