Optics and Precision Engineering, Volume. 20, Issue 11, 2395(2012)
Developments of DUV coating technologies in CIOMP
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ZHANG Li-chao, GAO Jin-song. Developments of DUV coating technologies in CIOMP[J]. Optics and Precision Engineering, 2012, 20(11): 2395
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Received: Sep. 7, 2012
Accepted: --
Published Online: Nov. 28, 2012
The Author Email: Li-chao ZHANG (lichaod@yahoo.com.cn)
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