INFRARED, Volume. 44, Issue 5, 1(2023)
Application of Reduced-Stepper Projection Lithography Machinein HgCdTe Infrared Detector Chip Process
[4] [4] Nikon Corporation. Nikon Step and Repeat System Operation Guide \[EB/OL\]. http://cdn-10.nikon-cdn.com/pdf/NC3_man.pdf, 1998.
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ZHAO Cheng-cheng, CHEN Shu-zhen, LEI Zheng, MENG Xiao-lan. Application of Reduced-Stepper Projection Lithography Machinein HgCdTe Infrared Detector Chip Process[J]. INFRARED, 2023, 44(5): 1
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Received: Nov. 14, 2022
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Published Online: Jan. 15, 2024
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