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INFRARED, Volume. 44, Issue 5, 1(2023)

Application of Reduced-Stepper Projection Lithography Machinein HgCdTe Infrared Detector Chip Process

Cheng-cheng ZHAO, Shu-zhen CHEN, Zheng LEI, and Xiao-lan MENG
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    ZHAO Cheng-cheng, CHEN Shu-zhen, LEI Zheng, MENG Xiao-lan. Application of Reduced-Stepper Projection Lithography Machinein HgCdTe Infrared Detector Chip Process[J]. INFRARED, 2023, 44(5): 1

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    Received: Nov. 14, 2022

    Accepted: --

    Published Online: Jan. 15, 2024

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    DOI:10.3969/j.issn.1672-8785.2023.05.001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology