Journal of Terahertz Science and Electronic Information Technology , Volume. 22, Issue 9, 1038(2024)

MEMS Pirani meter integrated with silicon micro devices

QIN Yifeng... LIU Zhenhua, SHI Zhigui, ZHANG Qingzhi and XIONG Zhuang* |Show fewer author(s)
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    References(12)

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    [3] [3] ZHANG Lemin, JIAO Binbin, YUN Shichang, et al. Investigation and optimization of Pirani vacuum gauges with monocrystal silicon heaters and heat sinks[J]. Journal of Microelectromechanical Systems, 2017,26(3):601-608. doi:10.1109/JMEMS.2017.2680738.

    [4] [4] LEE Dongjin, NOH Y, PARK S, et al. Performance enhancement of Pirani gauge on silicon-on-insulator wafer with simple fabrication process[J]. Sensors and Actuators A:Physical, 2017(263):264-268. doi:10.1016/j.sna.2017.06.032.

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    QIN Yifeng, LIU Zhenhua, SHI Zhigui, ZHANG Qingzhi, XIONG Zhuang. MEMS Pirani meter integrated with silicon micro devices[J]. Journal of Terahertz Science and Electronic Information Technology , 2024, 22(9): 1038

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    Paper Information

    Received: Dec. 27, 2022

    Accepted: --

    Published Online: Nov. 5, 2024

    The Author Email: Zhuang XIONG (xiong.zhuang@caep.cn)

    DOI:10.11805/tkyda2022248

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