[2] [2] CHAE J,STARK H B,NAJAFI K,et al. A micromachined Pirani gauge with dual heat sinks[J]. IEEE Transactions on Advanced Packaging, 2005,28(4):619-625. doi:10.1109/TADVP.2005.858316.

[3] [3] ZHANG Lemin, JIAO Binbin, YUN Shichang, et al. Investigation and optimization of Pirani vacuum gauges with monocrystal silicon heaters and heat sinks[J]. Journal of Microelectromechanical Systems, 2017,26(3):601-608. doi:10.1109/JMEMS.2017.2680738.

[4] [4] LEE Dongjin, NOH Y, PARK S, et al. Performance enhancement of Pirani gauge on silicon-on-insulator wafer with simple fabrication process[J]. Sensors and Actuators A:Physical, 2017(263):264-268. doi:10.1016/j.sna.2017.06.032.

[5] [5] XING Qian, LAI Junhua, YE Yuxin, et al. An improved physical model considering mirco-nano scale effects for numerical simulation of Pirani vacuum gauges[J]. IEEE Electron Device Letters, 2022, 43(11): 1985-1988. doi: 10.1109/LED. 2022.3208840.

[6] [6] ZHANG Ming,LLASER N. Exploiting a micro Pirani gauge for beyond atmospheric pressure measurement[J]. IEEE Transactions on Circuits and Systems II-Express Briefs, 2018,65(10):1450-1454. doi:10.1109/TCSII.2018.2859207.

[7] [7] GUO Song, FENG-LIU Haodong, CHEN Shuo, et al. Design of a high sensitivity Pirani gauge based on vanadium oxide film for high vacuum measurement[J]. Sensors, 2022,22(23):9275. doi:10.3390/s22239275.

[8] [8] MO Jiarui,MIDDELBURG L M,MORANA B,et al. Surface-micromachined silicon carbide Pirani gauges for harsh environments[J].IEEE Sensors Journal, 2021,21(2):1350-1358. doi:10.1109/JSEN.2020.3019711.

[9] [9] LAI Junhua,KONG Yanmei,JIAO Binbin,et al. Study on fusion mechanisms for sensitivity improvement and measurable pressure limit extension of Pirani vacuum gauges with multi heat sinks[J]. Journal of Microelectromechanical Systems, 2020,29(1):100-108. doi:10.1109/JMEMS.2019.2954155.

[10] [10] XU Wei,WANG Xiaoyi,PAN Xiaofang,et al. A wafer-level packaged CMOS MEMS Pirani vacuum gauge[J]. IEEE Transactions on Electron Devices, 2021,68(10):5155-5161. doi:10.1109/TED.2021.3103486.

[11] [11] MASTRANGELO C H, MULLER R S. Microfabricated thermal absolute-pressure sensor with on-chip digital front-end processor[J]. IEEE Journal of Solid-state Circuits, 1991,26(12):1998-2007. doi:10.1109/4.104194.

[12] [12] VI?ZVáRY Z,FüRJES P,BáRSONY I. Thermomechanical analysis of hotplates by FEM[J]. Microelectronics Journal, 2001, 32(10-11):833-837. doi:10.1016/S0026-2692(01)00070-2.

[13] [13] JIANG Wei,WANG Xin,ZHANG Jinwen. A single crystal silicon micro-Pirani vacuum gauge with high aspect ratio structure[J].Sensors and Actuators A:Physical, 2010,163(1):159-163. doi:10.1016/j.sna.2010.08.015.