Journal of Terahertz Science and Electronic Information Technology , Volume. 22, Issue 9, 1038(2024)
MEMS Pirani meter integrated with silicon micro devices
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QIN Yifeng, LIU Zhenhua, SHI Zhigui, ZHANG Qingzhi, XIONG Zhuang. MEMS Pirani meter integrated with silicon micro devices[J]. Journal of Terahertz Science and Electronic Information Technology , 2024, 22(9): 1038
Paper Information
Received: Dec. 27, 2022
Accepted: --
Published Online: Nov. 5, 2024
The Author Email: Zhuang XIONG (xiong.zhuang@caep.cn)
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